Description: This listing is for a brand new MKS Instruments 631F11T8FH Heated Baratron Capacitance Manometer. If there are any problems with this unit, please don't hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help. OverviewThe 631F11T8FH Heated Absolute Baratron® Capacitance Manometer features 10 Torr Full Scale pressure measurement, is heated to 200°C, and has a female 8 VCR type fitting. It operates at very high internal temperatures, minimizes the deposition of process byproducts within the sensor and nearly eliminating output drift caused by contamination. Its 200°C operating temperature permits use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). Its new packaging reduces the amount of installation space needed by at least 40%, making it even easier to design into new systems or retrofit into existing equipment. The 631F is completely self-contained, requiring only input power of ±15VDC for operation. No separate electronics modules are used, which both reduces the amount of installation space needed and provides better performance due to elimination of noise generating interconnecting cables. Its Inconel® sensor offers extremely high resistance to corrosion, and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The Type 631F high-performance analog electronics also include fail-safe over temperature protection and LED status lamps to indicate its operating state. An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available, allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure, eliminating the need for vacuum pumps during setpoint adjustment. Technical SpecsTypeVacuum/pressure TransducerMeasurement TypeAbsoluteFull Scale Range10 TorrSensor Temperature200°CAccuracy0.50% of ReadingFitting Type8 VCR femaleAnalog Output0-10 VDCAnalog Connector15-pin D-subTrip Relays2Relay ModeEnergizes below set pointRelay Contact Rating0.20 amps @ 30 VDCResolution0.01% of Full ScaleZero Temperature Coefficient0.008% of Full Scale/°C (0.016% of Full Scale/°C for 1 Torr range)Span Temperature Coefficient0.02% of Reading/°CResponse Time50 msecWarm-up Time4 hours or lessInternal Volume6.3 ccOperating Temperature Range15-50°COverpressure Limit45 psiaExposed MaterialsInconel® or Incoloy® nickel alloysPower Requirements± 15VDC (±5%) @ 1.0 amps maxAmbient Airflow Requirements150 ft/min for ambient temperatures of 40 - 50°CComplianceCE
Price: 999.99 USD
Location: Hillsboro, Oregon
End Time: 2024-12-01T01:41:18.000Z
Shipping Cost: N/A USD
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Item Specifics
Return shipping will be paid by: Seller
All returns accepted: Returns Accepted
Item must be returned within: 30 Days
Refund will be given as: Money Back
Return policy details:
Brand: MKS Instruments
Air Pressure Range: 10 Torr
MPN: 631F11T8FH
Unit Quantity: 1
Country/Region of Manufacture: United States